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LiTaO? polishing slurry （LT series）
LiTaO3 is a kind of piezoelectric material, which is the key material for making filter and resonator. Xinanna Co.LTD has developed a series of LiTaO3 slurry including LT-01 and LT-02.

 

T-01 slurry for the LiTaO3 wafer

Advantage:

1. High removal rate (>15μm/h)

2. Good surface quality: smooth, no obvious scratch, low surface roughness (<0.2nm).
3. An acidic slurry.

Application: Polishing of 4 inch LiTaO? wafer.

LT-02 slurry for the LiTaO? wafer

Advantage:

1. High removal rate (>10μm/h)

2. Good surface quality: smooth, no obvious scratch, low surface roughness (<0.15nm).
3. An alkaline slurry.

Application: Fine polishing of 4 inch LiTaO? wafer.